(19)
(11) EP 2 264 754 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
24.05.2017 Bulletin 2017/21

(45) Mention of the grant of the patent:
29.03.2017 Bulletin 2017/13

(21) Application number: 09715661.6

(22) Date of filing: 27.02.2009
(51) International Patent Classification (IPC): 
H01L 21/76(2006.01)
C09D 5/25(2006.01)
H01L 21/316(2006.01)
H01L 23/522(2006.01)
H01L 21/312(2006.01)
 B05D 7/24(2006.01)
C09D 183/16(2006.01)
H01L 21/768(2006.01)
H01L 21/762(2006.01)
(86) International application number:
PCT/JP2009/053651
(87) International publication number:
WO 2009/107768 (03.09.2009 Gazette 2009/36)

(54)

METHOD FOR FORMATION OF SILICEOUS FILM

VERFAHREN ZUR BILDUNG EINES KIESELERDEHALTIGEN FILMS

PROCÉDÉ DE FORMATION D'UN FILM SILICEUX

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 29.02.2008 JP 2008049906

(43) Date of publication of application:
22.12.2010 Bulletin 2010/51

(73) Proprietor: Merck Patent GmbH
64293 Darmstadt (DE)

(72) Inventors:
  • NAGAHARA, Tatsuro
    Kakegawa-shi Shizuoka 437-1412 (JP)
  • HAYASHI, Masanobu
    Kakegawa-shi Shizuoka 437-1412 (JP)

(74) Representative: Rippel, Hans Christoph 
Isenbruck Bösl Hörschler LLP Eastsite One Seckenheimer Landstrasse 4
68163 Mannheim
68163 Mannheim (DE)


(56) References cited: : 
JP-A- 11 307 626
JP-A- 2005 166 700
JP-A- 2008 010 884
US-B1- 6 191 002
 JP-A- 2002 035 683
JP-A- 2007 165 422
US-A1- 2005 116 300
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).