(19)

(11)

EP 2 266 145 A2

(12)

(88) Date of publication A3: 04.03.2010 (43) Date of publication: 29.12.2010 Bulletin 2010/52 (21) Application number: 09762961.2 (22) Date of filing: 04.03.2009

(51) International Patent Classification (IPC):  H01L 31/042(2006.01) H01L 21/324(2006.01) H01L 21/20(2006.01) (86) International application number: PCT/US2009/036083 (87) International publication number: WO 2009/151665 (17.12.2009 Gazette 2009/51)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA RS (30) Priority: 04.03.2008 US 33772 P (71) Applicants: Bollman, Brent San Jose, CA 95138 (US) Leidholm, Craig R. 5521 Hellyer Avenue San Jose, CA 95138 (US) Stanley, Nathaniel San Jose, CA 95138 (US) Rail, Matthew San Jose, CA 95138 (US)

(72) Inventors: Bollman, Brent San Jose, CA 95138 (US) Leidholm, Craig R. 5521 Hellyer Avenue San Jose, CA 95138 (US) Stanley, Nathaniel San Jose, CA 95138 (US) Rail, Matthew San Jose, CA 95138 (US) (74) Representative: Boyce, Conor  FRKelly 27 Clyde Road Ballsbridge Dublin 4 Dublin 4 (IE)