(19)
(11) EP 2 268 434 A1

(12)

(43) Date of publication:
05.01.2011 Bulletin 2011/01

(21) Application number: 09723334.0

(22) Date of filing: 29.01.2009
(51) International Patent Classification (IPC): 
B22F 3/18(2006.01)
B22F 3/00(2006.01)
(86) International application number:
PCT/US2009/000646
(87) International publication number:
WO 2009/117043 (24.09.2009 Gazette 2009/39)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA RS

(30) Priority: 20.03.2008 US 70125
12.01.2009 US 319754

(71) Applicant: Sci Engineered Materials, Inc.
Columbus, Ohio 43228 (US)

(72) Inventor:
  • CAMPBELL, Scott
    Worthington, Ohio 43085 (US)

(74) Representative: Fuchs 
Patentanwälte Söhnleinstraße 8
65201 Wiesbaden
65201 Wiesbaden (DE)

   


(54) A METHOD FOR MAKING COMPOSITE SPUTTERING TARGETS AND THE TARGETS MADE IN ACCORDANCE WITH THE METHOD