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(11)

EP 2 272 086 A2

(12)

(88) Date of publication A3: 04.03.2010 (43) Date of publication: 12.01.2011 Bulletin 2011/02 (21) Application number: 09762952.1 (22) Date of filing: 24.02.2009

(51) International Patent Classification (IPC):  H01L 21/302(2006.01) H01L 21/31(2006.01) (86) International application number: PCT/US2009/035030 (87) International publication number: WO 2009/151656 (17.12.2009 Gazette 2009/51)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA RS (30) Priority: 13.03.2008 US 48188 (71) Applicant: Lam Research Corporation Fremont, CA 94538-6470 (US)	(72) Inventors: YUN, Seokmin Pleasanton, CA 94588 (US) ZHU, Ji El Cerrito, CA 94530 (US) DELARIOS, John, M. Palo Alto, CA 94303 (US) WILCOXSON, Mark Oakland, CA 94611 (US) (74) Representative: Derry, Paul Stefan et al Venner Shipley LLP 20 Little Britain London EC1A 7DH London EC1A 7DH (GB)