MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF - Patent 2277191

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EP 2 277 191 A1

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(43)	Date of publication:
	26.01.2011 Bulletin 2011/04

(21)	Application number: 09739573.5

(22)	Date of filing: 28.04.2009

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International Patent Classification (IPC):

H01L 21/00^(2006.01)

(86)	International application number:
	PCT/US2009/041934

(87)	International publication number:
	WO 2009/134771 (05.11.2009 Gazette 2009/45)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA RS

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Priority:

28.04.2008 US 125753 P

(71)	Applicant: H. C. Starck, Inc.
	Newton, MA 02461-1951 (US)

(72)	Inventors:
	SUN, Shuwei Framingham MA 01701 (US) KUMAR, Prabhat Framingham MA 01701-7656 (US) SCHMIDT-PARK, Olaf Needham MA 02492 (US) WU, Rong-Chein, Richard Chelmsford MA 01824-4657 (US) ROZAK, Gary Akron OH 44333 (US) GAYDOS, Mark Nashua NH 03063 (US)

(74)	Representative: Haggenmüller, Christian
	Maiwald Patentanwalts GmbH Elisenhof Elisenstraße 3 80335 München 80335 München (DE)

(54)	MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF