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EP 2 283 514 A1

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(43) Date of publication: 16.02.2011 Bulletin 2011/07 (21) Application number: 08873989.1 (22) Date of filing: 25.04.2008

(51) International Patent Classification (IPC):  H01L 21/225(2006.01) H01L 31/18(2006.01) H01L 21/8238(2006.01) H01L 21/336(2006.01) H01L 21/20(2006.01) (86) International application number: PCT/US2008/061611 (87) International publication number: WO 2009/131587 (29.10.2009 Gazette 2009/44)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (71) Applicant: Innovalight, Inc. Sunnyvale, California 94085 (US)	(72) Inventors: TERRY, Mason Redwood City California 94061 (US) ANTONIADIS, Homer Mountain View California 94040 (US) POPLAVSKYY, Dmitry San Jose California 95129 (US) KELMAN, Maxim Mountain View California 94043 (US) (74) Representative: Ahner, Francis  Cabinet Régimbeau 20, rue de Chazelles 75847 Paris Cedex 17 75847 Paris Cedex 17 (FR)