(19)
(11) EP 2 283 968 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
27.11.2013 Bulletin 2013/48

(43) Date of publication A2:
16.02.2011 Bulletin 2011/07

(21) Application number: 10171593.6

(22) Date of filing: 02.08.2010
(51) International Patent Classification (IPC): 
B24D 5/06(2006.01)
B24D 13/02(2006.01)
B24B 27/00(2006.01)
 B24D 5/10(2006.01)
B24D 13/20(2006.01)
B24B 41/00(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated Extension States:
BA ME RS

(30) Priority: 03.08.2009 JP 2009181085

(71) Applicant: Canon Kabushiki Kaisha
Tokyo 146-8501 (JP)

(72) Inventor:
  • Masuyama, Kenichi
    Tokyo 146-8501 (JP)

(74) Representative: TBK 
Bavariaring 4-6
80336 München
80336 München (DE)

   


(54) Polishing method for a workpiece and polishing tool used for the polishing method


(57) Provided is a polishing tool capable of forming a high-quality surface of a workpiece in a short period of time. The polishing tool (10) comprises a rotation shaft (1) arranged parallel to a feed direction (S) of the polishing tool relative to a workpiece (W) and at least two polishing bodies (7,8). The first polishing body (8) includes a foamed resin such as a foamed polyurethane resin, and has an outer peripheral surface (8a) having a porosity higher than the porosity of the second polishing body (7). The second polishing body (7) comprises a non-foamed resin such as a non-foamed polyurethane resin being a material more rigid than the material used for the first polishing body (8). During polishing, the first polishing body (8) removes material from the surface (Wa) of the workpiece (W), and the second polishing body (7) smoothes an unevenness resulting from the material removal with the first polishing body (8).







Search report









Search report