INTERFEROMETRIC DEFECT DETECTION AND CLASSIFICATION

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EP 2 286 175 A1

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(43)	Date of publication:
	23.02.2011 Bulletin 2011/08

(21)	Application number: 09759262.0

(22)	Date of filing: 02.06.2009

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International Patent Classification (IPC):

G01B 9/02^(2006.01)

(86)	International application number:
	PCT/US2009/045999

(87)	International publication number:
	WO 2009/149103 (10.12.2009 Gazette 2009/50)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA RS

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Priority:

19.03.2009 US 210513 P
20.08.2008 US 189510 P
20.08.2008 US 189509 P
12.08.2008 US 190144 P
03.06.2008 US 130729 P
22.07.2008 US 135616 P
20.08.2008 US 189508 P

(71)	Applicant: Jeong, Hwan J.
	Los Altos, CA 94024 (US)

(72)	Inventor:
	Jeong, Hwan J. Los Altos, CA 94024 (US)

(74)	Representative: Brinck, David John Borchardt et al
	R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ London SW1H 0RJ (GB)

(54)	INTERFEROMETRIC DEFECT DETECTION AND CLASSIFICATION