(19)

(11)

EP 2 289 105 A1

(12)

(43) Date of publication: 02.03.2011 Bulletin 2011/09 (21) Application number: 09750952.5 (22) Date of filing: 19.05.2009

(51) International Patent Classification (IPC):  H01L 29/872(2006.01) H01L 29/06(2006.01) H01L 29/861(2006.01) (86) International application number: PCT/US2009/003089 (87) International publication number: WO 2009/142721 (26.11.2009 Gazette 2009/48)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA RS (30) Priority: 21.05.2008 US 124341 (71) Applicant: Cree, Inc. Durham, NC 27703 (US)	(72) Inventors: ZHANG, Qingchun Cary NC 27519 (US) RYU, Sei-Hyung Cary NC 27513 (US) (74) Representative: Cross, Rupert Edward Blount  Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)