(19)

(11)

EP 2 304 072 A1

(12)

(43) Date of publication: 06.04.2011 Bulletin 2011/14 (21) Application number: 08817317.4 (22) Date of filing: 10.07.2008

(51) International Patent Classification (IPC):  C23C 16/00(2006.01) (86) International application number: PCT/US2008/069685 (87) International publication number: WO 2010/005439 (14.01.2010 Gazette 2010/02)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 10.07.2007 US 958904 P 09.07.2008 US 170387 (71) Applicant: APPLIED MATERIALS, INC. Santa Clara, California 95051 (US)	(72) Inventors: CHOI, Soo Young Fremont California 94539 (US) LI, Liwei Sunnyvale California 94086 (US) (74) Representative: Zimmermann & Partner  Postfach 330 920 80069 München 80069 München (DE)