(19)

(11)

EP 2 304 282 A1

(12)

(43) Date of publication: 06.04.2011 Bulletin 2011/14 (21) Application number: 09790860.2 (22) Date of filing: 28.07.2009

(51) International Patent Classification (IPC):  F16J 15/43(2006.01) (86) International application number: PCT/US2009/051888 (87) International publication number: WO 2010/014563 (04.02.2010 Gazette 2010/05)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR Designated Extension States: AL BA RS (30) Priority: 30.07.2008 US 84779 P (71) Applicant: Rigaku Innovative Technologies Inc. Auburn Hills, MI 48326 (US)	(72) Inventor: HELGELAND, Walter Charlton, MA 01507 (US) (74) Representative: Solf, Alexander  Patentanwälte Dr. Solf & Zapf Candidplatz 15 81543 München 81543 München (DE)