(19)

(11)

EP 2 308 080 A1

(12)

(43) Date of publication: 13.04.2011 Bulletin 2011/15 (21) Application number: 09790062.5 (22) Date of filing: 02.07.2009

(51) International Patent Classification (IPC):  H01L 21/28(2006.01) H01L 27/115(2006.01) H01L 21/265(2006.01) H01L 21/8247(2006.01) H01L 29/423(2006.01) (86) International application number: PCT/US2009/049620 (87) International publication number: WO 2010/005878 (14.01.2010 Gazette 2010/02)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR Designated Extension States: AL BA RS (30) Priority: 09.07.2008 US 170321 09.07.2008 US 170327 (71) Applicant: Sandisk Corporation Milpitas, CA 95035 (US)	(72) Inventors: LEE, Dana Milpitas CA 95035 (US) CHIN, Henry Milpitas CA 95035 (US) KAI, James Milpitas CA 95035 (US) ORIMOTO, Takashi, Whitney Milpitas CA 95035 (US) PURAYATH, Vinod, R. Milpitas CA 95035 (US) MATAMIS, George Milpitas CA 95035 (US) (74) Representative: Tothill, John Paul  Dehns St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)