(19)

(11)

EP 2 308 082 A1

(12)

(43) Date of publication: 13.04.2011 Bulletin 2011/15 (21) Application number: 08794858.4 (22) Date of filing: 30.07.2008

(51) International Patent Classification (IPC):  H01L 21/335(2006.01) (86) International application number: PCT/US2008/009182 (87) International publication number: WO 2010/014058 (04.02.2010 Gazette 2010/05)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (71) Applicant: United Solar Ovonic LLC Auburn Hills, MI 48326 (US)	(72) Inventors: CANNELLA, Vincent Beverly Hills MI 48025 (US) UZONI, George West Bloomfield MI 48323 (US) DOTTER, Buddie Shelby Township MI 48316 (US) (74) Representative: Kügele, Bernhard et al Novagraaf International SA Avenue du Pailly 25 1220 Les Avanchets-Genève 1220 Les Avanchets-Genève (CH)