(19)

(11)

EP 2 308 104 A2

(12)

(88) Date of publication A3: 25.03.2010 (43) Date of publication: 13.04.2011 Bulletin 2011/15 (21) Application number: 09770725.1 (22) Date of filing: 10.06.2009

(51) International Patent Classification (IPC):  H01L 33/00(2010.01) (86) International application number: PCT/US2009/046835 (87) International publication number: WO 2009/158191 (30.12.2009 Gazette 2009/53)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA RS (30) Priority: 26.06.2008 US 75904 P (71) Applicant: 3M Innovative Properties Company Saint Paul, MN 55133-3427 (US)	(72) Inventors: ZHANG, Jun-Ying Saint Paul, MN 55133-3427 (US) SMITH, Terry, L. Saint Paul, MN 55133-3427 (US) HAASE, Michael, A. Saint Paul, MN 55133-3427 (US) (74) Representative: Vossius & Partner  P.O. Box 86 07 67 81634 München 81634 München (DE)