(19)
(11) EP 2 316 127 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
31.10.2018 Bulletin 2018/44

(45) Mention of the grant of the patent:
29.08.2018 Bulletin 2018/35

(21) Application number: 09803217.0

(22) Date of filing: 14.05.2009
(51) International Patent Classification (IPC): 
G01R 31/309(2006.01)
G01N 21/956(2006.01)
G01N 21/95(2006.01)
H01L 31/18(2006.01)
 G01N 21/88(2006.01)
H04N 7/18(2006.01)
H01L 21/66(2006.01)
(86) International application number:
PCT/SG2009/000173
(87) International publication number:
WO 2010/014041 (04.02.2010 Gazette 2010/05)

(54)

METHOD AND SYSTEM FOR DETECTING MICRO-CRACKS IN WAFERS

VERFAHREN UND SYSTEM FÜR DEN NACHWEIS VON MIKRORISSEN IN WAFERN

PROCEDE ET SYSTEME POUR DETECTER DES MICRO-FISSURES DANS DES PLAQUETTES

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 28.07.2008 SG 200805811

(43) Date of publication of application:
04.05.2011 Bulletin 2011/18

(73) Proprietor: Applied Materials, Inc.
Santa Clara, CA 95054 (US)

(72) Inventor:
  • CHAN, Sok Leng
    Singapore 540231 (SG)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)


(56) References cited: : 
EP-A1- 1 956 366
DE-A1-102004 054 102
JP-A- 2004 317 470
US-A- 4 689 491
US-A1- 2007 291 257
 EP-A2- 1 801 569
JP-A- 2003 017 536
JP-A- 2007 147 547
US-A1- 2004 169 850
US-B1- 6 768 543
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).