SACP method and particle optical system for performing the method

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(11)

EP 2 320 217 A8

(12)	CORRECTED EUROPEAN PATENT APPLICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 A2)

(48)	Corrigendum issued on:
	13.07.2011 Bulletin 2011/28

(43)	Date of publication:
	11.05.2011 Bulletin 2011/19

(21)	Application number: 10014424.5

(22)	Date of filing: 09.11.2010

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International Patent Classification (IPC):

G01N 23/203^(2006.01)
H01J 37/295^(2006.01)

H01J 37/28^(2006.01)
H01J 37/147^(2006.01)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

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Priority:

09.11.2009 DE 102009052392

(71)	Applicant: Carl Zeiss NTS GmbH
	73447 Oberkochen (DE)

(72)	Inventor:
	Preikszas, Dirk 73447 Oberkochen (DE)

(74)	Representative: Diehl & Partner GbR
	Patentanwälte Augustenstrasse 46 80333 München 80333 München (DE)

(54)	SACP method and particle optical system for performing the method

(57) A SACP (selected area channeling pattern) method comprising: directing a beam (9) of charged particles onto an object surface (23) of an object (25) using a particle optical system (1); and detecting intensities of particles emanating from the object; wherein the method comprises: (a1) adjusting an excitation of a second beam deflector (17,19) for adjusting an impingement location (29) of the beam on the object surface; (a2) adjusting an excitation of a first beam deflector (11,13) for adjusting an angle (Ψ) of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and (a3) repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence without changing the impingement location such that a corresponding intensity is detected (35) for each of at least 100 different angles of incidence at the same impingement location. The application also relates to a charged particle optical system (1) for performing the method.