TRANSPARENT CONDUCTIVE ZINC OXIDE DISPLAY FILM AND PRODUCTION METHOD THEREFOR - Patent 2338178

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EP 2 338 178 A1

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(43)	Date of publication:
	29.06.2011 Bulletin 2011/26

(21)	Application number: 09778822.8

(22)	Date of filing: 05.10.2009

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International Patent Classification (IPC):

H01L 31/18^(2006.01)

H01L 31/0224^(2006.01)

(86)	International application number:
	PCT/EP2009/007112

(87)	International publication number:
	WO 2010/046025 (29.04.2010 Gazette 2010/17)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
	Designated Extension States:
	AL BA RS

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Priority:

21.10.2008 EP 08018397
21.10.2008 US 255019

(71)	Applicant: Applied Materials, Inc.
	Santa Clara, CA 95054 (US)

(72)	Inventors:
	GRAW, Oliver 63755 Alzenau (DE) SCHREIBER, Udo 63637 Jossgrund (DE)

(74)	Representative: Zimmermann & Partner
	Postfach 330 920 80069 München 80069 München (DE)

(54)	TRANSPARENT CONDUCTIVE ZINC OXIDE DISPLAY FILM AND PRODUCTION METHOD THEREFOR