(19)
(11) EP 2 339 635 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
10.07.2013 Bulletin 2013/28

(43) Date of publication A2:
29.06.2011 Bulletin 2011/26

(21) Application number: 10196754.5

(22) Date of filing: 23.12.2010
(51) International Patent Classification (IPC): 
H01L 29/778(2006.01)
H01L 29/32(2006.01)
H01L 29/417(2006.01)
H01L 29/06(2006.01)
H01L 29/20(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 23.12.2009 FR 0906285

(71) Applicants:
  • Thales
    92200 Neuilly Sur Seine (FR)
  • Alcatel Lucent
    75007 Paris (FR)

(72) Inventors:
  • Morvan, Erwan
    91530, SAINT CHERON (FR)
  • Delage, Sylvain
    91400, ORSAY (FR)

(74) Representative: Bréda, Jean-Marc et al
Marks & Clerk France Conseils en Propriété Industrielle Immeuble " Visium " 22, avenue Aristide Briand
94117 Arcueil Cedex
94117 Arcueil Cedex (FR)

   


(54) High electron mobility transistor


(57) High-electron-mobility field-effect transistor (100, 105, 110) comprising a multilayer stack, fabricated in a z-direction, comprising a substrate (3) on which is arranged a semiconductor bar (2) comprising a buffer layer (8), an active layer (7) and a heterojunction (15) that extends continuously in an xy-plane perpendicular to the z-direction, the transistor comprising electrodes (4, 5, 6) deposited on the side (20) of the semiconductor bar opposite the substrate (3), called the top side (20), the electrodes (4, 5, 6) extending longitudinally in a longitudinal y-direction and being spaced out in a transverse x-direction orthogonal to the y-direction so that a gate (6) is placed between a source (4) and a drain (5) adjacent to said source (4), the semiconductor bar (2) comprising at least one elementary region (ei), said elementary region (ei) being a region extending continuously in the transverse direction from a source (4) as far as a drain (5) adjacent to said source (4), which source and drain extend along their entire length over said elementary region (ei), in which region at least one isolating well (19) and at least one conductive region (18) extend continuously, over the whole transverse dimension of the elementary region (ei).







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