(19)

(11)

EP 2 342 738 A2

(12)

(88) Date of publication A3: 01.07.2010 (43) Date of publication: 13.07.2011 Bulletin 2011/28 (21) Application number: 09818502.8 (22) Date of filing: 01.10.2009

(51) International Patent Classification (IPC):  H01L 21/306(2006.01) H01L 21/301(2006.01) H01L 21/3063(2006.01) (86) International application number: PCT/US2009/059199 (87) International publication number: WO 2010/039936 (08.04.2010 Gazette 2010/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR Designated Extension States: AL BA RS (30) Priority: 02.10.2008 US 102352 P 15.01.2009 US 144986 P (71) Applicant: Advanced Technology Materials, Inc. Danbury, CT 06810 (US)	(72) Inventors: KORZENSKI, Michael B. Danbury Connecticut 06810 (US) JIANG, Ping Danbury Connecticut 06810 (US) BEALL, Charles Cedar Park Texas 78613 (US) BJELOPAVLIC, Mick Chandler Arizona 85249 (US) (74) Representative: ABG Patentes, S.L.  Avenida de Burgos 16D Edificio Euromor 28036 Madrid 28036 Madrid (ES)