| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO
PL PT RO SE SI SK SM TR |
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Designated Extension States: |
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AL BA RS |
| (30) |
Priority: |
17.09.2008 US 212157 17.09.2008 US 212214
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara, CA 95054 (US) |
|
| (72) |
Inventors: |
|
- MOFFATT, Stephen
Millbrook St. Lawrence Jersey
Channel Islands JE3 1LL (GB)
- MAYUR, Abhilash, J.
Salinas
California 93907 (US)
- RAMAMURTHY, Sundar
Fremont
California 94539 (US)
- RANISH, Joseph
San Jose
California 95117 (US)
- HUNTER, Aaron
Santa Cruz
California 95060 (US)
|
| (74) |
Representative: Zimmermann & Partner |
|
Postfach 330 920 80069 München 80069 München (DE) |
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