(19)
(11) EP 2 342 739 A1

(12)

(43) Date of publication:
13.07.2011 Bulletin 2011/28

(21) Application number: 09814993.3

(22) Date of filing: 03.09.2009
(51) International Patent Classification (IPC): 
H01L 21/324(2006.01)
(86) International application number:
PCT/US2009/055838
(87) International publication number:
WO 2010/033389 (25.03.2010 Gazette 2010/12)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated Extension States:
AL BA RS

(30) Priority: 17.09.2008 US 212157
17.09.2008 US 212214

(71) Applicant: Applied Materials, Inc.
Santa Clara, CA 95054 (US)

(72) Inventors:
  • MOFFATT, Stephen
    Millbrook St. Lawrence Jersey Channel Islands JE3 1LL (GB)
  • MAYUR, Abhilash, J.
    Salinas California 93907 (US)
  • RAMAMURTHY, Sundar
    Fremont California 94539 (US)
  • RANISH, Joseph
    San Jose California 95117 (US)
  • HUNTER, Aaron
    Santa Cruz California 95060 (US)

(74) Representative: Zimmermann & Partner 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) MANAGING THERMAL BUDGET IN ANNEALING OF SUBSTRATES