(19)

(11)

EP 2 342 758 A2

(12)

(88) Date of publication A3: 20.05.2010 (43) Date of publication: 13.07.2011 Bulletin 2011/28 (21) Application number: 09788336.7 (22) Date of filing: 23.09.2009

(51) International Patent Classification (IPC):  H01L 31/055(2006.01) H01L 31/075(2006.01) H01L 31/032(2006.01) (86) International application number: PCT/NL2009/050572 (87) International publication number: WO 2010/036109 (01.04.2010 Gazette 2010/13)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR Designated Extension States: AL BA RS (30) Priority: 23.09.2008 EP 08164942 (71) Applicant: Advanced Surface Technology B.V. 8912 AR Leeuwarden (NL)	(72) Inventors: MEESTER, Benard NL-8927 AA Leeuwarden (NL) NANU, Marius NL-8927 AA Leeuwarden (NL) (74) Representative: Jansen, Cornelis Marinus et al VEREENIGDE Johan de Wittlaan 7 2517 JR Den Haag 2517 JR Den Haag (NL)