(19)
(11) EP 2 342 821 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
05.07.2017 Bulletin 2017/27

(45) Mention of the grant of the patent:
07.12.2016 Bulletin 2016/49

(21) Application number: 09750207.4

(22) Date of filing: 08.05.2009
(51) International Patent Classification (IPC): 
H03H 9/24(2006.01)
 H03H 9/02(2006.01)
(86) International application number:
PCT/IB2009/051904
(87) International publication number:
WO 2009/141750 (26.11.2009 Gazette 2009/48)

(54)

IMPROVED MEMS RESONATOR

VERBESSERTER MEMS-RESONATOR

RÉSONATEUR MEMS AMÉLIORÉ

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 19.05.2008 EP 08104020

(43) Date of publication of application:
13.07.2011 Bulletin 2011/28

(73) Proprietor: III Holdings 12, LLC
Wilmington, DE 19808 (US)

(72) Inventor:
  • STEENEKEN, Peter, G.
    Redhill Surrey RH1 1DL (GB)

(74) Representative: Ablett, Graham Keith et al
Ablett & Stebbing
7-8 Market Place London, W1W 8AG
7-8 Market Place London, W1W 8AG (GB)


(56) References cited: : 
US-A1- 2002 105 393
   
  • KEN DENG ET AL: "Piezoelectric Disk Resonators Based on Epitaxial AlGaAs Films" JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 16, no. 1, 1 February 2007 (2007-02-01), pages 155-162, XP011165332 ISSN: 1057-7157
  • KAAJAKARI V ET AL: "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications" IEEE ELECTRON DEVICE LETTERS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 25, no. 4, 1 April 2004 (2004-04-01), pages 173-175, XP011109647 ISSN: 0741-3106
  • AYAZI F ET AL: "VHF Single-Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators-Part I: Design and Modeling" JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 13, no. 6, 1 December 2004 (2004-12-01), pages 1043-1053, XP011123040 ISSN: 1057-7157
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).