| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO
PL PT RO SE SI SK SM TR |
|
Designated Extension States: |
|
AL BA RS |
| (30) |
Priority: |
23.07.2008 US 220443
23.07.2008 US 220444
23.07.2008 US 220447
|
| (60) |
Divisional application: |
|
11164973.7 |
|
11164990.1 |
| (71) |
Applicant: QUALCOMM MEMS TECHNOLOGIES, INC |
|
San Diego CA 92121 (US) |
|
| (72) |
Inventor: |
|
- CHUI, Clarence
Santa Clara, CA 95054 (US)
|
| (74) |
Representative: Witte, Weller & Partner |
|
Phoenixbau
Königstrasse 5
70173 Stuttgart
70173 Stuttgart (DE) |
|
