(19)

(11)

EP 2 350 342 A1

(12)

(43) Date of publication: 03.08.2011 Bulletin 2011/31 (21) Application number: 09748921.5 (22) Date of filing: 04.11.2009

(51) International Patent Classification (IPC):  C23C 16/448(2006.01) (86) International application number: PCT/US2009/063201 (87) International publication number: WO 2010/056576 (20.05.2010 Gazette 2010/20)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 11.11.2008 US 113325 P (71) Applicant: Praxair Technology, Inc. Danbury, CT 06810 (US)	(72) Inventors: SARIGIANNIS, Demetrius Grand Island NY 14072 (US) AHMED, Mushtaq, M. Pittsford NY 14534 (US) (74) Representative: Schwan - Schwan - Schorer  Bauerstrasse 22 80796 München 80796 München (DE)