(19)
(11) EP 2 351 073 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
07.11.2018 Bulletin 2018/45

(45) Mention of the grant of the patent:
04.07.2018 Bulletin 2018/27

(21) Application number: 09829413.5

(22) Date of filing: 15.05.2009
(51) International Patent Classification (IPC): 
H01L 21/66(2006.01)
 G01N 21/95(2006.01)
(86) International application number:
PCT/SG2009/000174
(87) International publication number:
WO 2010/062262 (03.06.2010 Gazette 2010/22)

(54)

APPARATUS FOR DETECTING MICRO-CRACKS IN WAFERS

VORRICHTUNG ZUR DETEKTION VON MIKRORISSEN IN WAFERN

APPAREIL DE DÉTECTION DE MICROFISSURES DANS DES TRANCHES

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 25.11.2008 SG 200808731

(43) Date of publication of application:
03.08.2011 Bulletin 2011/31

(73) Proprietor: Applied Materials, Inc.
Santa Clara, CA 95054 (US)

(72) Inventor:
  • CHAN, Sok Leng
    Singapore 540231 (SG)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Josephspitalstr. 15
80331 München
80331 München (DE)


(56) References cited: : 
EP-A1- 1 956 366
JP-A- 2003 247 953
KR-A- 940 020 481
US-B2- 6 829 047
 EP-A2- 1 801 569
JP-A- 2008 267 851
US-A1- 2004 169 850
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).