(19)
(11) EP 2 351 138 A2

(12)

(88) Date of publication A3:
02.09.2010

(43) Date of publication:
03.08.2011 Bulletin 2011/31

(21) Application number: 09828243.7

(22) Date of filing: 19.11.2009
(51) International Patent Classification (IPC): 
H01M 10/04(2006.01)
H01G 9/042(2006.01)
C23C 2/14(2006.01)
 H01M 10/0525(2010.01)
C23C 2/00(2006.01)
(86) International application number:
PCT/US2009/065205
(87) International publication number:
WO 2010/059865 (27.05.2010 Gazette 2010/21)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 24.11.2008 US 117535 P
18.11.2009 US 620788

(71) Applicant: Applied Materials, Inc.
Santa Clara, CA 95054 (US)

(72) Inventors:
  • LOPATIN, Sergey
    Morgan Hill California 95037 (US)
  • BACHRACH, Robert, Z.
    Burlingame California 94010 (US)

(74) Representative: Zimmermann & Partner 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) APPARATUS AND METHOD FOR FORMING 3D NANOSTRUCTURE ELECTRODE FOR ELECTROCHEMICAL BATTERY OR CAPACITOR