(19)

(11)

EP 2 356 676 A2

(12)

(88) Date of publication A3: 12.08.2010 (43) Date of publication: 17.08.2011 Bulletin 2011/33 (21) Application number: 09744303.0 (22) Date of filing: 29.10.2009

(51) International Patent Classification (IPC):  H01L 21/762(2006.01) (86) International application number: PCT/US2009/062504 (87) International publication number: WO 2010/059361 (27.05.2010 Gazette 2010/21)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 30.10.2008 US 290384 30.10.2008 US 290362 (71) Applicant: Corning Incorporated Corning, NY 14831 (US)

(72) Inventors: CHEREKDJIAN, Sarko Campbell California 95008 (US) CITES, Jeffrey, S. Horseheads New York 14845 (US) COUILLARD, James, G. Ithaca New York 14850 (US) MASCHMEYER, Richard, O. Corning New York 14830 (US) MOORE, Michael, J. Corning New York 14830 (US) USENKO, Alex Painted Post New York 14870 (US) (74) Representative: Greene, Simon Kenneth  Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks Kent TN13 1XR Sevenoaks Kent TN13 1XR (GB)