(19)
(11) EP 2 361 321 A2

(12)

(88) Date of publication A3:
15.07.2010

(43) Date of publication:
31.08.2011 Bulletin 2011/35

(21) Application number: 09740186.3

(22) Date of filing: 16.10.2009
(51) International Patent Classification (IPC): 
C23C 14/56(2006.01)
A43B 1/00(2006.01)
B01J 3/00(2006.01)
H01J 37/32(2006.01)
(86) International application number:
PCT/GB2009/002499
(87) International publication number:
WO 2010/046636 (29.04.2010 Gazette 2010/17)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 23.10.2008 GB 0819474

(71) Applicant: P2i Limited
Abingdon, Oxfordshire OX14 4SA (GB)

(72) Inventor:
  • KING, Charles, Edmund
    Oxfordshire OX5 1EH (GB)

(74) Representative: Brewster, Andrea Ruth et al
Greaves Brewster LLP Indigo House Cheddar Business Park Wedmore Road
GB-Cheddar, Somerset BS27 3EB
GB-Cheddar, Somerset BS27 3EB (GB)

   


(54) VACUUM PROCESSING APPARATUS