(19)

(11)

EP 2 370 987 A2

(12)

(88) Date of publication A3: 23.09.2010 (43) Date of publication: 05.10.2011 Bulletin 2011/40 (21) Application number: 09837994.4 (22) Date of filing: 18.12.2009

(51) International Patent Classification (IPC):  H01J 17/28(2006.01) H01L 51/50(2006.01) G02F 1/1333(2006.01) (86) International application number: PCT/US2009/068770 (87) International publication number: WO 2010/080624 (15.07.2010 Gazette 2010/28)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 18.12.2008 US 138736 P 16.10.2009 US 252295 P 16.02.2009 US 152879 P (71) Applicant: Manufacturing Resources International, INC. Alpharetta, GA 30005 (US)	(72) Inventors: DUNN, William, R. Alpharetta, GA 30005 (US) HUBBARD, Timothy Alpharetta, GA 30005 (US) BEDELL, Ware Alpharetta, GA 30005 (US) (74) Representative: Winter, Brandl, Fürniss, Hübner, Röss, Kaiser, Polte - Partnerschaft  Bavariaring 10 80336 München 80336 München (DE)