(19)

(11)

EP 2 370 993 A1

(12)

(43) Date of publication: 05.10.2011 Bulletin 2011/40 (21) Application number: 08879303.9 (22) Date of filing: 30.12.2008

(51) International Patent Classification (IPC):  H01L 21/06(2006.01) (86) International application number: PCT/US2008/014112 (87) International publication number: WO 2010/077226 (08.07.2010 Gazette 2010/27)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR (71) Applicant: Nanosys, Inc. Palo Alto, CA 94304 (US)	(72) Inventor: DUBROW, Robert, S. San Carlos, CA 94070 (US) (74) Representative: Kiddle, Simon John et al Mewburn Ellis LLP 33 Gutter Lane London EC2V 8AS London EC2V 8AS (GB)