(19)
(11) EP 2 378 125 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
26.11.2014 Bulletin 2014/48

(43) Date of publication A2:
19.10.2011 Bulletin 2011/42

(21) Application number: 11003265.3

(22) Date of filing: 18.04.2011
(51) International Patent Classification (IPC): 
F04C 29/06(2006.01)
 F04C 25/02(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 19.04.2010 JP 2010096541
19.04.2010 JP 2010096542
19.04.2010 JP 2010096543
19.04.2010 JP 2010096544
19.04.2010 JP 2010096545

(71) Applicant: Ebara Corporation
Tokyo 144-8510 (JP)

(72) Inventors:
  • Ito, Kazuma
    Tokyo (JP)
  • Usui, Katsuaki
    Tokyo (JP)

(74) Representative: Emde, Eric 
Wagner & Geyer Gewürzmühlstrasse 5
80538 München
80538 München (DE)

   


(54) Dry vacuum pump apparatus


(57) A dry vacuum pump apparatus includes a dry vacuum pump (10) having a final outlet port (18) and an intermediate release outlet port (19), an exhaust section check valve (51) connected to the final outlet port (18) and having an outlet port, an intermediate section check valve (52) connected to the intermediate release outlet port (19) and having an outlet port, and an exhaust passage (56) connected to the outlet port of the exhaust section check valve (51) and the outlet port of the intermediate section check valve (52), a silencer (53) connected to the exhaust passage (56) and having an outlet port connected to a final exhaust passage (56a) which is vented to the atmosphere.







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Search report