(19)
(11) EP 2 380 189 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
09.07.2014 Bulletin 2014/28

(45) Mention of the grant of the patent:
09.04.2014 Bulletin 2014/15

(21) Application number: 09799471.9

(22) Date of filing: 29.12.2009
(51) International Patent Classification (IPC): 
H01L 21/033(2006.01)
(86) International application number:
PCT/US2009/069711
(87) International publication number:
WO 2010/078343 (08.07.2010 Gazette 2010/27)

(54)

RESIST FEATURE AND REMOVABLE SPACER PITCH DOUBLING PATTERNING METHOD FOR PILLAR STRUCTURES

RESISTMERKMAL UND VERFAHREN ZUR STRUKTURIERUNG MIT RASTERABSTANDVERDOPPLUNG EINER ENTFERNBAREN ABSTANDSSCHICHT FÜR SÄULENSTRUKTUREN

PROCÉDÉ DE FORMATION DES MOTIFS À DOUBLAGE DE PAS D'ÉLÉMENTS DE RESIST ET D'ESPACEURS AMOVIBLES POUR STRUCTURES DE PILIER

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 31.12.2008 US 318609

(43) Date of publication of application:
26.10.2011 Bulletin 2011/43

(73) Proprietor: SanDisk 3D LLC
Milpitas, CA 95035 (US)

(72) Inventors:
  • CHEN, Yung-Tin
    Santa Clara California 95054 (US)
  • RADIGAN, Steven J.
    Fremont California 95439 (US)

(74) Representative: Tothill, John Paul 
Dehns St Bride's House 10 Salisbury Square
London EC4Y 8JD
London EC4Y 8JD (GB)


(56) References cited: : 
US-A1- 2008 206 681
US-A1- 2009 227 108
 US-A1- 2008 318 169
US-A1- 2010 105 210
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).