(19)

(11)

EP 2 380 213 A1

(12)

(43) Date of publication: 26.10.2011 Bulletin 2011/43 (21) Application number: 08876510.2 (22) Date of filing: 17.12.2008

(51) International Patent Classification (IPC):  H01L 31/18(2006.01) H01L 21/268(2006.01) (86) International application number: PCT/US2008/087091 (87) International publication number: WO 2010/071638 (24.06.2010 Gazette 2010/25)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR (71) Applicant: Sionyx, Inc. Beverly, Massachusetts 01915 (US)	(72) Inventors: CAREY, James Beverly, MA 01915 (US) PRALLE, Martin Beverly, MA 01915 (US) (74) Representative: Cooper, John  Murgitroyd & Company 165-169 Scotland Street Glasgow G5 8PL Glasgow G5 8PL (GB)