(19)

(11)

EP 2 386 117 A2

(12)

(88) Date of publication A3: 04.11.2010 (43) Date of publication: 16.11.2011 Bulletin 2011/46 (21) Application number: 10729657.6 (22) Date of filing: 12.01.2010

(51) International Patent Classification (IPC):  H01L 27/146(2006.01) (86) International application number: PCT/US2010/020742 (87) International publication number: WO 2010/081137 (15.07.2010 Gazette 2010/28)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 12.11.2009 US 616922 03.03.2009 US 156906 P 12.01.2009 US 144149 P 11.12.2009 US 636071 07.10.2009 US 575008 (71) Applicant: Mc10, Inc. Waltham, MA 02451 (US)	(72) Inventors: DE GRAFF, Bassel Don Miguel Sanjuan (TT) CALLSEN, Gilman Malden MA 02148 (US) ARORA, William, J. Boston MA 02116 (US) GHAFFARI, Roozbeh Cambridge MA 02142 (US) (74) Representative: Driver, Virginia Rozanne et al Page White & Farrer Bedford House John Street London WC1N 2BF London WC1N 2BF (GB)