| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO
PL PT RO SE SI SK SM TR |
| (30) |
Priority: |
28.01.2009 US 206139 P
|
| (71) |
Applicants: |
|
- Applied Thin Films, Inc.
Evanston, IL 60201 (US)
- Sambasivan, Sankar
Chicago, Illinois 60645 (US)
- Kaul, Vikram Sharad
Chicago, Illinois 60654 (US)
- Chapman Jr., Francis Richard
Mount Prospect, Illinois 60056 (US)
- Donelan, Jeffrey William
Highland Park, Illinois 60035 (US)
|
|
| (72) |
Inventors: |
|
- SAMBASIVAN, Sankar
Chicago, Illinois 60645 (US)
- KAUL, Vikram Sharad
Chicago, Illinois 60654 (US)
- CHAPMAN JR., Francis Richard
Mount Prospect, Illinois 60056 (US)
- DONELAN, Jeffrey William
Highland Park, Illinois 60035 (US)
|
| (74) |
Representative: Hamer, Christopher K. |
|
Mathys & Squire LLP
120 Holborn
London
EC1N 2SQ
London
EC1N 2SQ (GB) |
|
