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(11)

EP 2 393 959 A2

(12)

(88) Date of publication A3: 14.04.2011 (43) Date of publication: 14.12.2011 Bulletin 2011/50 (21) Application number: 10739228.4 (22) Date of filing: 08.02.2010

(51) International Patent Classification (IPC):  C23C 16/26(2006.01) H01G 9/042(2006.01) C01B 31/02(2006.01) H01M 4/96(2006.01) (86) International application number: PCT/US2010/023484 (87) International publication number: WO 2010/091352 (12.08.2010 Gazette 2010/32)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 09.02.2009 US 151159 P 25.02.2009 US 155454 P 02.03.2009 US 156862 P 30.06.2009 US 459313 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)

(72) Inventors: LOPATIN, Sergey Morgan Hill, California 95037 (US) BACHRACH, Robert Z. Burlingame, California 94010 (US) BREVNOV, Dmitri A. Santa Clara, California 95054 (US) LAZIK, Christopher S. Fremont, California 94555 (US) JIN, Miao San Jose, California 95131 (US) URITSKY, Yuri Newark, California 94560 (US) (74) Representative: Zimmermann & Partner  Josephspitalstr. 15 80331 München 80331 München (DE)