(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO
PL PT RO SE SI SK SM TR |
(30) |
Priority: |
04.02.2009 US 149933 P 25.02.2009 US 155454 P 02.03.2009 US 156862 P 30.06.2009 US 459313
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(71) |
Applicant: Applied Materials, Inc. |
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Santa Clara, CA 95054 (US) |
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(72) |
Inventors: |
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- LOPATIN, Sergey, D.
Morgan Hill
CA 95037 (US)
- BREVNOV, Dmitri, A.
Santa Clara
CA 95054 (US)
- BACHRACH, Robert, Z.
Burlingame
CA 94010 (US)
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(74) |
Representative: Zimmermann & Partner |
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Postfach 330 920 80069 München 80069 München (DE) |
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