(19)

(11)

EP 2 396 811 A2

(12)

(88) Date of publication A3: 18.11.2010 (43) Date of publication: 21.12.2011 Bulletin 2011/51 (21) Application number: 10741718.0 (22) Date of filing: 11.02.2010

(51) International Patent Classification (IPC):  H01L 21/288(2006.01) H01L 31/18(2006.01) (86) International application number: PCT/US2010/023878 (87) International publication number: WO 2010/093781 (19.08.2010 Gazette 2010/33)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 11.02.2009 US 369045 (71) Applicant: United Solar Ovonic LLC Auburn Hills, MI 48326 (US)

(72) Inventors: LIU, Shengzhong Rochester Hills MI 48309 (US) HU, Chaolan Rochester Hills MI 48306 (US) ZHOU, Yanhua Rochester Hills MI 18309 (US) YOUNAN, Kais Rochester Hills MI 48307 (US) DOTTER, Bud Shelby Township MI 48136 (US) CANNELLA, Vincent Beverly Hills MI 48025 (US) BANERJEE, Arindam Bloomfield Hills MI 48302 (US) YANG, Jeffrey Troy MI 48098 (US) GUHA, Subhendu Auburn Hills MI 48326 (US) (74) Representative: Høiberg A/S  St. Kongensgade 59 A DK-1264 Copenhagen K DK-1264 Copenhagen K (DK)