(19)
(11) EP 2 404 317 A1

(12)

(43) Date of publication:
11.01.2012 Bulletin 2012/02

(21) Application number: 10749454.4

(22) Date of filing: 08.03.2010
(51) International Patent Classification (IPC): 
H01L 21/4763(2006.01)
(86) International application number:
PCT/US2010/026570
(87) International publication number:
WO 2010/102306 (10.09.2010 Gazette 2010/36)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 06.03.2009 US 158223 P

(71) Applicant: Solexel, Inc.
Milpitas, CA 95035-7405 (US)

(72) Inventors:
  • RICOLCOL, Rafael
    Fremont, CA 94555 (US)
  • KRAMER, Joe
    San Jose, CA 95125 (US)
  • WANG, David, Xuan-Qi
    Fremont, CA 94539 (US)
  • MOSLEHI, Mehrdad, M.
    Los Altos, CA 94024 (US)

(74) Representative: Richardt, Markus Albert 
Richardt Patentanwälte Wilhelmstraße 7
DE-65185 Wiesbaden
DE-65185 Wiesbaden (DE)

   


(54) METHOD FOR RELEASING A THIN-FILM SUBSTRATE