(19)
(11) EP 2 409 096 A2

(12)

(88) Date of publication A3:
19.05.2011

(43) Date of publication:
25.01.2012 Bulletin 2012/04

(21) Application number: 10710389.7

(22) Date of filing: 15.03.2010
(51) International Patent Classification (IPC): 
F25D 19/00(2006.01)
(86) International application number:
PCT/GB2010/000454
(87) International publication number:
WO 2010/106309 (23.09.2010 Gazette 2010/38)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 16.03.2009 GB 0904500

(71) Applicant: Oxford Instruments Nanotechnology Tools Limited
Oxon OX13 5QX (GB)

(72) Inventors:
  • GARSIDE, John
    Oxfordshire OX13 5QX (GB)
  • KINGLEY, Simon
    Oxfordshire OX13 5QX (GB)
  • CROWTHER, Gavin
    Oxfordshire OX13 5QX (GB)
  • BUEHLER, Matthias
    82343 Poecking (DE)
  • WERNICKE, Doreen
    85774 Unterfoehring (DE)

(74) Representative: Skone James, Robert Edmund 
Gill Jennings & Every LLP The Broadgate Tower 20 Primrose Street
London EC2A 2ES
London EC2A 2ES (GB)

   


(54) CRYOGEN FREE COOLING APPARATUS AND METHOD