| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO
PL PT RO SE SI SK SM TR |
| (30) |
Priority: |
29.04.2009 NL 1036912
29.04.2009 US 173638 P
|
| (71) |
Applicant: Mapper Lithography IP B.V. |
|
2628 XK Delft (NL) |
|
| (72) |
Inventors: |
|
- BAARS, Norman Hendrikus Rudolf
NL-5522 GT Eindhoven (NL)
- STEENBRINK, Stijn Willem Herman
NL-2593 EC Den Haag (NL)
- TEN BERGE, Gerardus Fernandus
NL-4908 BD Oosterhout (NL)
|
| (74) |
Representative: Mooij, Maarten |
|
Hoyng Monégier LLP
Rembrandt Tower, 31st Floor
Amstelplein 1
NL-1096 HA Amsterdam
NL-1096 HA Amsterdam (NL) |
|
