(19)
(11) EP 2 427 802 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
27.05.2015 Bulletin 2015/22

(45) Mention of the grant of the patent:
01.04.2015 Bulletin 2015/14

(21) Application number: 10720380.4

(22) Date of filing: 04.05.2010
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
(86) International application number:
PCT/EP2010/056000
(87) International publication number:
WO 2010/128027 (11.11.2010 Gazette 2010/45)

(54)

OPTICAL IMAGING WITH REDUCED IMMERSION LIQUID EVAPORATION EFFECTS

OPTISCHE BILDGEBUNG MIT VERRINGERTEN IMMERSIONSFLÜSSIGKEITSVERDAMPFUNGSEFFEKTEN

IMAGERIE OPTIQUE PRÉSENTANT DES EFFETS RÉDUITS DE L'ÉVAPORATION DU LIQUIDE D'IMMERSION

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 04.05.2009 US 175072 P
07.05.2009 GB 0907864

(43) Date of publication of application:
14.03.2012 Bulletin 2012/11

(73) Proprietor: Carl Zeiss SMT GmbH
73447 Oberkochen (DE)

(72) Inventor:
  • SIX, Stephan
    73431 Aalen (DE)

(74) Representative: Cohausz & Florack 
Patent- & Rechtsanwälte Partnerschaftsgesellschaft mbB Bleichstraße 14
40211 Düsseldorf
40211 Düsseldorf (DE)


(56) References cited: : 
EP-A1- 1 491 956
WO-A1-2005/081067
WO-A1-2008/053918
US-A1- 2006 044 640
 WO-A1-02/28793
WO-A1-2008/031576
JP-A- 2005 175 176
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).