(19)
(11) EP 2 433 303 A1

(12)

(43) Date of publication:
28.03.2012 Bulletin 2012/13

(21) Application number: 09845033.1

(22) Date of filing: 22.05.2009
(51) International Patent Classification (IPC): 
H01L 29/00(2006.01)
(86) International application number:
PCT/US2009/044952
(87) International publication number:
WO 2010/134922 (25.11.2010 Gazette 2010/47)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(71) Applicant: International Business Machines Corporation
Armonk, NY 10504 (US)

(72) Inventors:
  • FILIPPI, Ronald
    Hopewell Junction NY 12533 (US)
  • STANDAERT, Theodorus, E.
    Hopewell Junction NY 12533 (US)
  • GRUNOW, Stephan
    Hopewell Junction NY 12533 (US)
  • SANKARAN, Sujatha
    Hopewell Junction NY 12533 (US)
  • CHANDA, Kaushik
    Winchester, Hampshire SO21 2JN (GB)
  • GAMBINO, Jeffrey, P.
    Essex Junction VT 05452 (US)
  • SIMON, Andrew, H.
    Hopewell Junction NY 12533 (US)
  • HU, Chao-kun
    Yorktown Heights NY 10598 (US)
  • BONILLA, Griselda
    Hopewell Junction NY 12533 (US)

(74) Representative: Williams, Julian David 
IBM United Kingdom Limited Intellectual Property Law Mailpoint 110
Hursley Park Winchester Hampshire SO21 2JN
Hursley Park Winchester Hampshire SO21 2JN (GB)

   


(54) STRUCTURE AND METHOD OF FORMING ELECTRICALLY BLOWN METAL FUSES FOR INTEGRATED CIRCUITS