(19)
(11) EP 2 434 522 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
23.07.2014 Bulletin 2014/30

(45) Mention of the grant of the patent:
04.06.2014 Bulletin 2014/23

(21) Application number: 11195133.1

(22) Date of filing: 08.07.2003
(51) International Patent Classification (IPC): 
H01J 37/317(2006.01)
B82Y 10/00(2011.01)
 H01J 37/12(2006.01)
B82Y 40/00(2011.01)

(54)

Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method

Linse für einen Ladungsträger-Vielfachstrahl, Ladungsträgerstrahlbelichtungsapparatur mit einer solchen Linse und entsprechendes Herstellungsverfahren

Lentille à faisceaux multiples de particules chargées, appareil d'exposition aux faisceaux de particules chargées utilisant la même lentille, et la méthode correspondante de fabrication.

(84) Designated Contracting States:
DE GB NL

(30) Priority: 16.07.2002 JP 2002207292
30.01.2003 JP 2003022088

(43) Date of publication of application:
28.03.2012 Bulletin 2012/13

(62) Application number of the earlier application in accordance with Art. 76 EPC:
03254334.0 / 1383158

(73) Proprietors:
  • Canon Kabushiki Kaisha
    Tokyo 146-8501 (JP)
  • Hitachi Ltd.
    Chiyoda-ku, Tokyo 100-8220 (JP)

(72) Inventors:
  • Ono, Haruhito
    Tokyo 146-8501 (JP)
  • Nagae, Kenichi
    Tokyo 146-8501 (JP)
  • Takakuwa, Masaki
    Tokyo (JP)
  • Nakayama, Yoshinori
    Chiyoda-ku, Tokyo 100-8220 (JP)
  • Muto, Harunobu
    Chiyoda-ku, Tokyo 100-8220 (JP)

(74) Representative: TBK 
Bavariaring 4-6
80336 München
80336 München (DE)


(56) References cited: : 
JP-A- 2 100 250
US-A1- 2001 052 576
 JP-A- 2001 345 259
US-A1- 2002 000 766
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).