(19)
(11) EP 2 443 644 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
15.05.2013 Bulletin 2013/20

(45) Mention of the grant of the patent:
03.04.2013 Bulletin 2013/14

(21) Application number: 10742622.3

(22) Date of filing: 14.06.2010
(51) International Patent Classification (IPC): 
H01J 37/08(2006.01)
H01J 37/28(2006.01)
 H01J 37/02(2006.01)
(86) International application number:
PCT/US2010/038459
(87) International publication number:
WO 2010/147872 (23.12.2010 Gazette 2010/51)

(54)

COOLED CHARGED PARTICLE SYSTEMS AND METHODS

GEKÜHLTE TEILCHENSTRAHLSYSTEME UND VERFAHREN

SYSTÈMES À PARTICULES CHARGÉES REFROIDIES ET PROCÉDÉS

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 18.06.2009 US 218282 P

(43) Date of publication of application:
25.04.2012 Bulletin 2012/17

(60) Divisional application:
13001553.0

(73) Proprietor: Carl Zeiss Microscopy, LLC
Thornwood, NY 10594 (US)

(72) Inventors:
  • COMMUNALE, Richard
    Ipswich, MA 01938 (US)
  • BARRISS, Louise
    North Reading, MA 01864 (US)
  • MCVEY, Shawn
    Newton, New Hampshire 03858 (US)
  • DIMANNA, Mark D.
    Fremont, New Hampshire 03044 (US)
  • GROHOLSKI, Alexander
    Salem, New Hampshire 01970 (US)
  • SANFORD, Colin A.
    Atkinson, New Hampshire 03811 (US)
  • BASSETT, Brian M.
    South Hampton, New Hampshire 03827 (US)
  • NOTTE IV, John A.
    Gloucester, MA 01930 (US)

(74) Representative: Carl Zeiss AG - Patentabteilung 
Carl Zeiss AG C/o Patentabteilung Carl-Zeiss-Straße 22
73447 Oberkochen
73447 Oberkochen (DE)


(56) References cited: : 
EP-A1- 2 031 633
US-A- 3 702 932
US-A- 4 489 569
US-A1- 2006 101 832
 JP-A- 63 175 318
US-A- 3 745 785
US-A- 5 119 637
US-A1- 2007 245 749
   
  • LEVI-SETTI RICCARDO: "HIGH-RESOLUTION SCANNING TRANSMISSION LOW-ENERGY ION MICROSCOPES AND MICROANALYZERS", ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, ACADEMIC PRESS INC., NEW YORK, NY, US, no. SUPPLEMENT 13A, 1 January 1980 (1980-01-01), pages 261-320, XP009073485, ISSN: 0065-2539
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).