ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSK..HRIS..MTNO....SM..................*JDIM360 Ver 2.40 (30 Jan 2013) - 2999001/02443644CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120130515W173deBibliographieenBibliographyfrBibliographieEP10742622.32010061420120116enenen218282 P20090618US2013051520132020120425201217201304032013142012110520130515201320H01J 37/08 20060101AFI20111020BHEP H01J 37/02 20060101ALI20111020BHEP H01J 37/28 20060101ALI20111020BHEP deGEKÜHLTE TEILCHENSTRAHLSYSTEME UND VERFAHRENenCOOLED CHARGED PARTICLE SYSTEMS AND METHODSfrSYSTÈMES À PARTICULES CHARGÉES REFROIDIES ET PROCÉDÉSEP-A1- 2 031 633JP-A- 63 175 318US-A- 3 702 932US-A- 3 745 785US-A- 4 489 569US-A- 5 119 637US-A1- 2006 101 832US-A1- 2007 245 749LEVI-SETTI RICCARDO: "HIGH-RESOLUTION SCANNING TRANSMISSION LOW-ENERGY ION MICROSCOPES AND MICROANALYZERS", ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, ACADEMIC PRESS INC., NEW YORK, NY, US, no. SUPPLEMENT 13A, 1 January 1980 (1980-01-01), pages 261-320, XP009073485, ISSN: 0065-253913001553.020130326COMMUNALE, Richard1 Vincent RoadIpswich, MA 01938USBARRISS, Louise330 Park StrretNorth Reading, MA 01864USMCVEY, Shawn46 Williamine DriveNewton, New Hampshire 03858USDIMANNA, Mark D.59 Deer RunFremont, New Hampshire 03044USGROHOLSKI, Alexander12 Flying Cloud LaneSalem, New Hampshire 01970USSANFORD, Colin A.5 Haydn DriveAtkinson, New Hampshire 03811USBASSETT, Brian M.124 Chase RoadSouth Hampton, New Hampshire 03827USNOTTE IV, John A.18 Lawndale CircleGloucester, MA 01930USCarl Zeiss Microscopy, LLC101371071P17782WOEPOne Zeiss DriveThornwood, NY 10594USCarl Zeiss AG - Patentabteilung101234096Carl Zeiss AG C/o Patentabteilung Carl-Zeiss-Straße 2273447 OberkochenDEALATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTROSESISKSMTRUS201003845920100614enWO201014787220101223201051