(19)
(11) EP 2 458 610 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 A1)

(48) Corrigendum issued on:
06.02.2013 Bulletin 2013/06

(88) Date of publication A3:
30.05.2012 Bulletin 2012/22

(43) Date of publication:
30.05.2012 Bulletin 2012/22

(21) Application number: 10193180.6

(22) Date of filing: 30.11.2010
(51) International Patent Classification (IPC): 
H01H 59/00(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(71) Applicant: NXP B.V.
5656 AG Eindhoven (NL)

(72) Inventors:
  • Goosens, Martijn
    Redhill, Surrey RH1 1DL (GB)
  • Suy, Hilco
    Redhill, Surrey RH1 1DL (GB)
  • Steeneken, Peter Gerard
    Redhill, Surrey RH1 1DL (GB)
  • Reimann, Klaus
    Redhill, Surrey RH1 1DL (GB)

(74) Representative: Williamson, Paul Lewis 
NXP Semiconductors Intellectual Property and Licensing Red Central 60 High Street
Redhill, Surrey RH1 1SH
Redhill, Surrey RH1 1SH (GB)

 
Remarks:
Amended claims in accordance with Rule 137(2) EPC.
 


(54) MEMS switch


(57) A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode.
The use of three of more signal lines enables a symmetrical actuation force to be achieved, and/or enables multiple switch functions to be implemented by the single movable electrode.