(19)

(11)

EP 2 460 179 A2

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(88) Date of publication A3: 05.05.2011 (43) Date of publication: 06.06.2012 Bulletin 2012/23 (21) Application number: 10804865.3 (22) Date of filing: 29.06.2010

(51) International Patent Classification (IPC):  H01L 21/687(2006.01) H02N 13/00(2006.01) C23C 16/458(2006.01) B23Q 3/15(2006.01) H01L 21/683(2006.01) (86) International application number: PCT/US2010/040284 (87) International publication number: WO 2011/014328 (03.02.2011 Gazette 2011/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR (30) Priority: 30.07.2009 US 512520 (71) Applicant: LAM Research Corporation Fremont, CA 94538-6401 (US)	(72) Inventors: STEVENSON, Tom Fremont, CA 94538-6401 (US) BYUN, Daniel Fremont, CA 94538-6401 (US) ULLAL, Saurabh Fremont, CA 94538-6401 (US) KADKHODAYAN, Babak Fremont, CA 94538-6401 (US) DHINDSA, Rajinder Fremont, CA 94538-6401 (US) (74) Representative: Kontrus, Gerhard  SEZ AG SEZ-Straße 1 A-9500 Villach A-9500 Villach (AT) (56) References cited: :