(19)
(11) EP 2 462 487 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.10.2014 Bulletin 2014/41

(45) Mention of the grant of the patent:
23.07.2014 Bulletin 2014/30

(21) Application number: 10742621.5

(22) Date of filing: 30.07.2010
(51) International Patent Classification (IPC): 
G03F 7/00(2006.01)
(86) International application number:
PCT/US2010/002136
(87) International publication number:
WO 2011/016849 (10.02.2011 Gazette 2011/06)

(54)

ADJACENT FIELD ALIGNMENT IN IMPRINT LITHOGRAPHY

AUSRICHTUNG BENACHBARTER FELDER IN DER IMPRINTLITHOGRAPHIE

ALIGNEMENT DE CHAMPS ADJACENTS DANS LA LITHOGRAPHIE PAR IMPRESSION

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 04.08.2009 US 231182 P
29.07.2010 US 846211

(43) Date of publication of application:
13.06.2012 Bulletin 2012/24

(73) Proprietors:
  • Canon Nanotechnologies, Inc.
    Austin, Texas 78758-3650 (US)
  • Molecular Imprints, Inc.
    Austin, Texas 78758-3650 (US)

(72) Inventors:
  • MCMACKIN, Ian Matthew
    Austin Texas 78731 (US)
  • MARTIN, Wesley
    Westfield IN 46074 (US)

(74) Representative: Sutto, Luca 
Ponzellini, Gioia e Associati S.r.l. Via Mascheroni, 31
20145 Milano
20145 Milano (IT)


(56) References cited: : 
WO-A2-2009/020193
US-A1- 2008 018 875
 US-A1- 2006 144 275
US-A1- 2010 072 667
   
  • JEONG ET AL: "A step-and-repeat UV-nanoimprint lithography process using an elementwise patterned stamp", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 82, no. 2, 1 October 2005 (2005-10-01), pages 180-188, XP005091207, ISSN: 0167-9317, DOI: DOI:10.1016/J.MEE.2005.07.013
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).