(19)
(11) EP 2 463 716 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
20.05.2015 Bulletin 2015/21

(45) Mention of the grant of the patent:
18.03.2015 Bulletin 2015/12

(21) Application number: 12150443.5

(22) Date of filing: 28.06.2006
(51) International Patent Classification (IPC): 
G03F 9/00(2006.01)
G03F 7/20(2006.01)
 G01B 11/00(2006.01)

(54)

Surface position detection apparatus, exposure apparatus, and exposure method

Oberflächenpositionserkennungsvorrichtung, Belichtungsvorrichtung und Belichtungsverfahren

Appareil de détection de position de surface, appareil d'exposition et procédé d'exposition

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 08.07.2005 JP 2005200178

(43) Date of publication of application:
13.06.2012 Bulletin 2012/24

(62) Application number of the earlier application in accordance with Art. 76 EPC:
06767469.7 / 1909062

(73) Proprietor: Nikon Corporation
Tokyo 100-8331 (JP)

(72) Inventors:
  • Hidaka, Yasuhiro
    Tokyo 100-8331 (JP)
  • Nagayama, Tadashi
    Tokyo 100-8331 (JP)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)


(56) References cited: : 
JP-A- 63 275 912
US-A1- 2002 000 520
 US-A- 5 633 721
US-A1- 2004 165 169
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).